China to unveil first domestic high-energy ion implanter this year

The high energy ion implanter independently developed by the China Electronics Technology Group (CETGC) company recently realized the acceleration of million electron volt high energy ions, and its performance reaches the international advanced level, according to Xinhua News Agency.

The high energy ion implanter independently developed by the China Electronics Technology Group (CETGC) company recently realized the acceleration of million electron volt high energy ions, and its performance reached international advanced level, according to Xinhua News Agency.

It is expected that this first high-energy ion implanter in China will be launched by the end of 2020, with the ability to provide a complete set of solutions for ion implanters for global chip manufacturing companies.

This means that China will be able to independently innovate and develop a full range of ion implanters in the field of chip manufacturing and provide complete solutions for ion implanters for global chip manufacturing companies.

Ion implanter is the key equipment in chip manufacturing. The high-energy ion implanter is the most technically difficult model among ion implanters, and is one of the three mainstream ion implanter models in the field of integrated circuits. Previously, additional medium-beam ion implanters and large-beam ion implanters have been delivered by the company.

In the chip manufacturing process, it is necessary to incorporate different kinds of elements to change the electrical properties of the material in a predetermined manner. These elements are accelerated to a predetermined energy in the form of charged ions and implanted into a specific semiconductor material. This is the process of ion “implantation”.

Different implant dose, angle, depth, etc. will affect the performance, yield and life of a chip. This process is entirely controlled by the ion implanter.

The high-energy ion implanter has great research and development difficulties and high industry competition. It is a critical part of China’s integrated circuit manufacturing equipment industry chain that needs to be urgently acquired.

Disclaimer: This is an article created by Michael Liang for Chinasdg.org. You can find the original article here: https://chinasdg.org/2020/07/07/china-to-unveil-first-domestic-high-energy-ion-implanter-this-year/.

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